欢迎访问《图学学报》 分享到：
图学学报

图学学报

• 交互设计与虚拟现实 • 上一篇    下一篇

一种高精度MEMS 梳齿驱动器有限元仿真方法及实验

  

  • 出版日期:2012-06-29 发布日期:2015-07-28

A new high precision simulation method for MEMS comb actuator and the experiment

  • Online:2012-06-29 Published:2015-07-28

PDF (PC)

280

被引次数

3

摘要： 为解决目前MEMS 梳齿电容驱动器由于边缘效应导致的理想计算模型计
算误差较大问题，利用有限单元法中的能量法，提出了一种对梳齿驱动器电容量进行精确仿
真计算的方法并以实际制作的微机械陀螺质量块上的90 对梳齿驱动器为对象，分别利用该
方法及常用的CMATRIX 仿真方法对其电容值进行了仿真计算。两种方法得到的电容量的计
算结果分别为1.5283pF 和1.5793pF。二者与利用高精度LCR 测试仪得到的结果1.5172pF
的相对误差分别为0.73%和4.09%。实验结果表明，该方法对考虑边缘效应的MEMS 梳齿
电容驱动器具有较高的计算精度。

关键词: MEMS, 梳齿驱动器, 边缘效应, 有限单元法, 能量法

Abstract: A new simulation method is introduced to solve the problem of high calculating
errors of the ideal model caused by the edge effect for MEMS (Micro-electromechanical System)
comb capacitor. In this method, the energy method in FEM (Finite Element Method) is used and
the MEMS comb actuator (90 pairs of comb teeth) which is fabricated on a MEMS gyroscope is
used for simulation. The simulated results of capacitance with this method and the conventional
method CMATRIX are 1.5283pF and 1.5793pF. The relative errors between them and the LCR
high precision capacitance measuring device measured result 1.5172pF are 0.73% and 4.09%
respectively. It is concluded from the experiment this method can obtain high calculating precision
for MEMS comb capacitor.

Key words: MEMS, comb actuator, edge effect, finite element method, energy method