Abstract: For the requirements of moving particles image measurement in microscopic
environment, the measurement system is built, and the measurement chip based on MEMS
technology is developed. On the base of analyzing the characteristics of microscopic images of
moving particles, the image measurement methods based on the particle moving characteristic are
put forward, thereinto target extraction arithmetic based on datum frame is advanced, which
solves the problem of aim division of moving particles, and according as the degradation model of
image motion blur, the image blur restoration is realized. At last the example of a debris in
lubricating oil is given, the calculating result validates the efficiency of analyzing method for
moving particle in the article.

Key words: microscopic image, moving particles, blur restoration, image measurement